Author: Engblom, C.
Paper Title Page
High Stability and Precision Positioning: Challenges to Control and Innovative Scanning X-Ray Nanoprobe  
  • C. Engblom, Y.-M. Abiven, F. Alves, N. Jobert, S.K. Kubsky, F. Langlois
    SOLEIL, Gif-sur-Yvette, France
  Funding: This work has been performed in the framework of the R&D collaboration between the Nanoscopium (Synchrotron SOLEIL, St Aubin, France) and NanoMAX (MAXIV, Lund Sweden) beamlines.
Since 2012, Synchrotron SOLEIL in France and MAXIV in SWEDEN started a collaboration to develop a high precision scanning hard X-ray nanoprobe system which is under construction at SOLEIL. This scanning nanoprobe is completed by a series of positioning stages for stacked Fresnel Zone Plate focusing optics, designed in order to provide a quality of the nano-beam adapted to the high precision of the xyzƟ sample positioning stage. This nanoprobe set-up aims to reach some deca-nanometers spatial resolution for 2D and 3D measurements. The implementation of fast scanning is one of the challenges of this system. Over the last two years several positioning stages have been characterized and compared to the wished static and dynamic requirements applying thorough metrology methods. This paper presents some test results obtained and the control architecture defined during the last two years while building the first prototype of the sample positioning stage.
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